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#decapping

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3ax accelerometer/gyro chip. Composite of 3 different chips that I decapped. Didn't get a complete view of top right unfortunately.

I thought the bottom was accel at first, but thinking they are gyros now? Dual mass vibrating kind? Lack of combs on the top devices is throwing me, just a few plates that I can see.

There are "pits" or cutouts under two of the three devices under the bottom, which is contributing to my feeling they are gyros (to help allow coriolis distortion)